Energy Dispersive X-ray Analyzer

X-ray Microscope

Glow Discharge Optical Emission Spectroscopy

In-line Particle Sensor(Ultra-pure Watar)

Dissolved Oxygen Monitor

Silica Monitor

2-Channel Resistivity Meter

Silica Analyzer

SC-1 Monitor

HF/HCL/NH₃ Concentration Monitor

SC-2 Monitor

Dissolved Ozone Monitor

FPM Monitor

Resistivity Meter

BHF Monitor

2-Channel Carbon Sensor Resistivity Meter

HF/HNO₃Monitor

Carbon Sensor Resistivity Meter

Fiber Optic Type Chemical Solution Concentration Monitor

Conductivity Meter (Low Density Type)

TMAH/H₂O₂ Monitor

Conductivity Meter (High Density Type)

SPM Monitor

TMAH Conductivity Meter

Hydrofluoric Acid Monitor

Liquid Mass Flow Meter/Controller

In-line Particle Sensor (Chemicals/Resist)

FTIR Gas Analyzer

Digital Mass Flow Controller

In-line Gas Monitor

Vaporized Liquid Source Control System

Automatic Pressure Regulator

Liquid Auto Refill System

Liquid InjectionSystem

Mass Flow Controller

Residual Gas Analyzer

Plasma Diagnosis Endpoint Monitor

Full Automatic Spectroscopic Ellipsometer

Plasma Diagnosis Endpoint Monitor

Full Automatic Raman Analyzer

Real Time Interferometric Film Thickness Monitor

Visible Spectroscopic Ellipsometer

Real Time Interferometric Film Thickness Monitor

Single-wavelength Ellipsometer

Spectroscopic Ellipsometer

Fluoride Ion Monitor

Free Fluoride Ion Monitor

Total Nitrogen/Total Phosphorus Measurement System

Laser Scattering Particle Size Distribution Analyzer

Dynamic Light Scattering Particle Size Distribution Analyzer