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Highly reliable analysis systems for supporting
the evolution of FPDs in a wide range of processes


HORIBA is applying its advanced semiconductor technologies to the field of FPDs.
The HORIBA Group has fostered various analysis and evaluation technologies for silicon semiconductor manufacturing processes, a field where strict specifications must be satisfied.
HORIBA is now making full use of these technologies in the field of FPD processing.
These technologies of course provide manufacturing support for various types of processes, including gas and liquid medication composition, the detection of particles on masks, and thin film measurement.
These technologies are also being applied to high-performance analytical equipment that supports the research and development of PDPs, organic EL, FEDs, and the diversifying and evolving field of FPDs.

·  Please click on the process for further information.

 
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Thin Film Analysis
·  Full Automatic Film Analyzer
 
FF-1000 Series
·  Visible Spectroscopic Ellipsometer
MM-16
 
·  Spectroscopic Ellipsometer
 
UVISEL Series
     
         

Lithography Process
·  FPD Mask Particle Detection System
PR-PD4
·  Reticle/Mask Particle Detection System
 
PR-PD3
         

Dry Process
Gas Analysis
 
·  In-line Gas Monitor
 
IR-150S/150L
·  FTIR Gas Analyzer
 
FG-100A Series
 
 
Gas Control
 
 
·  Mass Flow Controller
 
SEC-Z500X Series
 
·  Mixed Injection System
 
MI/MV Series
 
 
·  Automatic Pressure Regulator
 
UR-7300 Series
 
·  Liquid Auto Refill System
 
LU-A1000 series
 
 
·  Digital Liquid Mass Flow Meter/Controller
 
LF-F/LV-F Series
     
 
Vacuum Measurement
 
 
·  Residual Gas Analyzer
 
MICROPOLE™ System
     
 
Thin Film Control/Analysis
 
 
·  Plasma Diagnosis Endpoint Monitor
CPM100
     
         

Wet Process
·  HNO3/CH3COOH/H3PO4 Monitor
(for AI Etching)
CS-139J
·  Conductivity Meter
(High Concentration Type)
 
HE-480H
 
·  BHF Monitor
 
CS-137
 
·  TMAH Conductivity Meter
 
HE-960TM
 
 
·  Hydrofluoric Acid Monitor
 
CM-200/210
 
·  In-line Particle Sensor (Ultra-pure Water)
 
PLCA-800
 
 
·  Conductivity Meter
(Low Concentration Type)
 
HE-480C
     
         

R&D, Small-scale Production
·  Fluorescence Lifetime System
 
FluoroMax FluoroLog FluoroCube
·  X-ray Microscope
 
XGT-5000 / 5100WR
 
·  Raman Microscopy
 
LabRAM HR
 
·  Cathodeluminescence Measuring Equipment
 
MP Series
 
 
·  Photoluminescence Measurement System
LabRAM HR-PL
 
·  Glow Discharge Optical Emission Spectroscopy
GD-Profiler 2
 
 
·  Energy Dispersive X-ray Analyzer
 
EMAX ENERGY
 
·  Laser Scattering Particle Size Distribution Analyzer
 
Partica LA-950
 
         

Compliant with WEEE/RoHS
·  ICP Emission Spectrometer
 
ULTIMA 2
·  Harmful Element Eluorescence X-ray Inspection Instrument
 
XGT-1000WR / 1100WR
         


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