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List by Production Process

Cell Process
Cell Process Cell Process
Dry Process
Gas Analysis
 
·  In-line Gas Monitor
 
IR-150S/150L
·  FTIR Gas Analyzer
 
FG-100A Series
 
 
Gas Control
 
 
·  Mass Flow Controller
 
SEC-Z500X Series
 
·  Mixed Injection System
 
MI/MV Series
 
 
·  Automatic Pressure Regulator
 
UR-7300 Series
 
·  Liquid Auto Refill System
 
LU-A1000 series
 
 
·  Digital Liquid Mass Flow Meter/Controller
 
LF-F/LV-F Series
     
 
Vacuum Measurement
 
 
·  Residual Gas Analyzer
 
MICROPOLE™ System
     
 
Thin Film Control/Analysis
 
 
·  Plasma Diagnosis Endpoint Monitor
CPM100
     
         

Thin Film Analysis
·  Full Automatic Film Analyzer
 
FF-1000 Series
·  Visible Spectroscopic Ellipsometer
MM-16
 
·  Spectroscopic Ellipsometer
 
UVISEL Series
     
         


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