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VG series
Specification
Capacitance manometers
Measurement principles
Uses
Signal chart
External dimensions

Capacitance Manometers

VG series


Uses

• Pressure monitor for semiconductor/LCD manufacturing processes.
• Pressure monitor for vacuum heat treatment furnaces and vacuum dryers.
• Pressure monitor for vacuum packing equipment.
• Pressure monitor for injection and degassing equipment.
• Pressure monitor for equipment used to lay down thin films.
• Ideal for use as a pressure monitor with various other kinds of vacuum equipment.

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