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VG series
Specification
Capacitance manometers
Measurement principles
Uses
Signal chart
External dimensions

Capacitance Manometers

VG series


Specification

Model
VG-111
(Temperature correcting model, room temperature)
VG-121
(Temperature control model, 50/100çC)
Measurement range
1.3332 x 105Pa
1000Torr
1.3332 x 102Pa
1Torr
1.3332 x 103Pa
10Torr
1.3332 x 104Pa
100Torr
1.3332 x 105Pa
1000Torr
Precision
± 0.45%Rdg (min. 0.1% F.S.)
Zero temperature coefficient
0.005% F.S. /°C
Span temperature coefficient
0.04%Rdg/°C
0.02%Rdg/°C
Resolution
0.005% F.S. or lower
Response time
20ms
Compression limit
300kPa
Power source voltage
± 15VDC ± 5% 60mA
± 15VDC ± 5%
Output
0 to 10VDC
Mass
264 g
274 g
CE
89/336/EEC


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