 |
|
|
Capacitance Manometers
VG series
Measurement principles
The VG series of capacitance manometers are partitioned by a thin metal diaphragm that is stretched across the interior. PR is a standard chamber in which high vacuum is maintained; PX is connected to the vacuum measurement section.
The pressure on the PX side displaces the diaphragm, and the capacitance varies with the distance between the fixed electrode and the diaphragm (d).
The changes in the capacitance between the fixed electrode and diaphragm are converted into pressure signals (electrical signals).
|
|
