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Capacitance Manometers
VG series
Capacitance manometers
The VG series of capacitance manometers are extremely precise and reliable, thanks to their use of an Inconel diaphragm. The VG-111 features temperature compensation circuits that minimize the impact of changes in the surrounding temperature, and the resulting thermal expansion and contraction, on measurement. The VG-121 actually adjusts the temperature of the partial pressure measurement section to prevent deposition of subsidiary substances and condensation of reactive gases. This gives it the reliability required for use with film deposition equipment utilized in the fields of semiconductor and liquid crystal display manufacturing.
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