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Direct injection
VC series
Specification
Model |
VC-1310 |
VC-1410 |
Flow rate generated*1 (During TEOS generation) |
1.0 CCM or less (liquid phase conversion) |
Max. 5.0 CCM conversion (liquid phase conversion) |
Liquids supported |
All liquids except those corrosive to stainless steel (ex, HCl and HF) |
Temperature rise |
Max. 150°C |
Pressure generated*1 |
Reduced pressure |
Leak Integrity |
External leak: 1.0 x 10-8 Pa·m3/s (He) or less; Internal leak: 1 x 10-6 Pa·m3/s (He) or less |
Materials in gas contact area |
SUS316L (PTFE) |
Internal heater volume |
AC 100 V, 70 W (35 W x 2) |
Temperature sensor used |
Thermocouple K type (CA) |
Pressure Resistance |
1.0 MPa (G) |
Standard Fitting |
Liquid inlet: 1/16" special joint, 1/8" VCR type male, 1/8" Swagelok type; Gas outlet: 1/4" VCR type male, 1/4" VCR type female |
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*1 Varies depending on the type of liquid.
*CCM is a symbol indicating gas flow rate (mL/min at 25°C, 101.3 kPa).
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