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VC series
Specification
Dimension
Sample system configuration

Direct injection

VC series


Overview

Compact vaporization system that can be used in different configurations, thanks to its use of non-carrier vaporization
Compact: 1/5 the size of previous models
Can be installed in a variety of positions.
Best-selling TEOS vaporization system models.
No need for a special bubbling tank or vaporization tank.

Brochure Related Info
Products

Products
Digital Liquid Mass Flow Meter / Controller
LF-F/LV-F series
Digital Liquid Mass Flow Meter / Controller LF-F/LV-F series
Featuring the world's first sensor with a unique cooling method

Mixed injection
MI/MV series
Mixed injection MI/MV series
Vaporize liquids efficiently using the gas-liquid mixture vaporization method
 
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