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Liquid source vaporization systems
TL series
Basic systems that enables stable vaporization in atmospheric pressure and support large flow vaporization.
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Feature a specially designed vaporizer. The introduction of a carrier gas enables stable vaporization in atmospheric pressure and large flow vapor generation. |
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Systems consist of a carrier gas mass flow controller, liquid mass flow controller for liquid source control, and vaporizer. |
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Vaporization systems available to suit generation pressures and flow rates for a variety of liquid sources. |
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