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Mass Flow Meter
SEF-7300 series
Overview
•High Performance and Long Stability for Zero Point / Adopted New Type Sensor
•Fast Response / T98 within 1sec.
•Compact Size / Face to Face Dimensions 106mm
Specifications
SEF-7330 |
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Wetted Materials : |
M type : SUS-316L, R type : SUS-316L, Viton |
Flow Range : |
5/10/20/50/100/200/500 SCCM 1/2/3/5/10 SLM |
Flow Control Range : |
0-100% F.S. |
Accuracy : |
±1.0% F.S. |
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SEF-7350 |
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Wetted Materials : |
M type : SUS-316L, R type : SUS-316L, Viton |
Flow Range : |
20/30 SLM |
Flow Control Range : |
0-100% F.S. |
Accuracy : |
±1.0% F.S. |
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SEF-7355 |
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Wetted Materials : |
M type : SUS-316L, R type : SUS-316L, Viton |
Flow Range : |
50/100 SLM |
Flow Control Range : |
0-100% F.S. |
Accuracy : |
±1.0% F.S. |
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SEF-7140 |
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Wetted Materials : |
M type : SUS-316L, R type : SUS-316L, Viton |
Flow Range : |
5/10/20/50/100/200/500 SCCM 1/2/3/5/10 SLM |
Flow Control Range : |
0-100% F.S. |
Accuracy : |
±1.0% F.S. |
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