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Mass Flow Meter
SEF-4400 series
Overview
•Ultra Clean Model / Stainless Diaphragm Metal O ring ( M type)
•Control Wide Range / 0.1 SCCM _ 100SLM (N2)
Specifications
SEF-4400 |
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Wetted Materials : |
M type : SUS-316L, R type : SUS-316L, Viton |
Flow Range : |
5/10/20/50/100/200/500 SCCM 1/2/3/5 SLM |
Flow Control Range : |
0_100% F.S. |
Accuracy : |
±1.0% F.S. |
Response : |
less than 1 second (T98) |
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SEF-4500 |
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Wetted Materials : |
M type : SUS-316L, R type : SUS-316L, Viton |
Flow Range : |
10/20 SLM |
Flow Control Range : |
0_100% F.S. |
Accuracy : |
±1.0% F.S. |
Response : |
less than 1 second (T98) |
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SEF-4550 |
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Wetted Materials : |
M type : SUS-316L, R type : SUS-316L, Viton |
Flow Range : |
30/50 SLM |
Flow Control Range : |
0_100% F.S. |
Accuracy : |
±1.0% F.S. |
Response : |
less than 1 second (T98) |
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SEF-4600 |
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Wetted Materials : |
M type : SUS-316L, R type : SUS-316L, Viton |
Flow Range : |
50/100 SLM |
Flow Control Range : |
0_100% F.S. |
Accuracy : |
±1.0% F.S. |
Response : |
less than 1 second (T98) |
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