HORIBA STEC japan Worldwide
News & EventsCompanyProcurement HomeContactsSite MapJapaneseUSEurope
Products & Support Mass Flow Controller Liquid Flow and Vaporizer Vacuum and Gas Monitor Pressure Controller Semiconductor Process Product List

 Home > Products & Support > High Performance Mass Flow Controller

Product Image

SEC-Z500X series
High Accuracy ±1.0% S.P.
High Speed Response
Multi-gas, multi-range solution
Specification
Dimensions
Connection examples
Software

High Performance Mass Flow Controller

SEC-Z500X


All-in-one and High-end model with RoHS compliance

The mass flow controller, is a key piece of semiconductor manufacturing equipment.
Its quality and efficiency play a major role in the success or failure of the semiconductor manufacturing process.
HORIBA STEC, a company that has consistently introduced high-quality,
highly functional products to the demanding semiconductor manufacturing market,
and thereby grown its worldwide market share to over 30%*1,
has recently developed a new mass flow controller,
one that breaks the mold completely and will change the future of mass flow control technology.
That new mass flow controller is the SEC-Z500X.
It provides all the mass flow functions customers need, including the flexibility to handle different gas types and flow volumes.
The customer him or herself can alter its specifications to suit changing needs*2.
The unit is also RoHS compliant, which makes it the perfect environmentally friendly tool for improving corporate value.
The highly functional, high added value 'X' is brimming with previously unknown charm.
The world is witnessing the birth of a mass flow controller that will change the future of the semiconductor industry.
*1 From VLSI's 2005 Research Report.
*2 Multi-gas, multi-range function


Main Features


Quality and dependability
The superior dependability you expect from HORIBA STEC. Industry leader
HORIBA STEC, is a brand hailed by equipment manufacturers throughout the world, one of many indications that HORIBA STEC consistently supplies high-quality, highly dependable products that meet the toughest standards.

Reliable supply
HORIBA STEC quickly and reliably supplies equipment to its customers through its three main bases: Kyoto, which acts as HORIBA STEC s headquarters; Aso, the HORIBA Group s mass production factory, which features the latest in production equipment; and two bases in the United States (CA, TX), which act as ultra-quick suppliers.
* The new Aso factory was completed in October 2005.

Global Support
A reliable support system with an international network
Using a network that has branches throughout the world, HORIBA STEC s highly skilled engineers offer complete support for all HORIBA STEC products.

RoHS compliant
Complying with all RoHS regulations
The Corporate Social Responsibility (CSR) of companies involves, among other things, working to protect the environment. As a company within the HORIBA Group, a leader in environmental analysis equipment, HORIBA STEC is always striving to develop and manufacture environmentally sound products.

RoHS regulations:
RoHS stands for "Restriction of Hazardous Substances", and is a set of regulations enforced in the EU to limit the use of six hazardous substances (lead, mercury, cadmium, hexavalent chromium, polybrominated biphenyls (PBBs), and polybrominated diphenyls (PBDEs)), in electric and electronic components.


Brochure
 
TOP
Copyright (C) 2008 HORIBA STEC, Co.,Ltd. All rights reserved.

Copyright © 2008 HORIBA STEC, Co.,Ltd. All rights reserved. The information shown on this document may be modified without notice. Refer to the original web page for update. The page was copied from:
 
Explore the future HORIBA STEC