Model |
SEC- |
Z512MG
(DeviceNet™ model: Z514MG) |
Z522MG
(DeviceNet™ model: Z524MG) |
SEF- |
Z512MG
(DeviceNet™ model: Z514MG) |
Z522MG
(DeviceNet™ model: Z524MG) |
Materials used in gas contact area |
M: type, SUS316L, internal surface polishing standard |
Valve Type |
Open at power-off: O Close at power-off: C |
Standard Flow Range
(N2 Equivalent F.S.) |
#01: 30/#1.5: 55/#02: 100/#2.5: 175/#03: 300/#3.5: 550 SCCM
#04: 1/#4.5: 1.75/#05: 3/#5.5: 5.5/#06: 10 SLM |
#07: 30/#08: 50 SLM
*Available for N2,H2,Ar,O2 Please contact us if you need another gases others |
Flow Rate Control Range |
2 to 100% F.S. |
Response speed |
Less than 1 sec across the entire flow rate control range (T98) |
Accuracy |
± 1.0%S.P.(30 to 100%F.S.) ± 0.25%F.S.(2 to 25%F.S.)
(Description in accordance with SEMI STANDARD E56-1296) |
Linearity |
± 0.5% F.S. |
Repeatability |
± 0.2% F.S. |
Operating differential pressure |
50 to 300kPa (d) [0.5 to 3.0kgf/cm2 (d)]
(#5.5 and #06 100 to 300kPa(d) |
#07: 200 to 300kPa(d)
#08: 200(valve C)/250(valve O) to 300kPa(d) |
Maximum operating pressure |
450 kPa (G) |
Pressure Resistance |
1MPa(G) |
Leak Integrity |
less than 5 x 10-12 Pa·m3/s (He) |
Operating Temperature |
5 to 50°C |
Flow rate setting signal |
Digital: RS-485 (F-Net protocol)
DeviceNet™: (SEC-Z514MG/Z524MG)
Analog: 0.1 to 5VDC (Input impedance : more then 1MΩ) |
Flow rate output signal |
Digital: RS-485 (F-Net protocol)
DeviceNet™: (SEC-Z514MG/Z524MG)
Analog: 0 to 5VDC (Minimun load resistance 2kΩ) |
Drive Power Source |
+15V ± 5% 150mA -15V ± 5% 150mA DeviceNet : Conforms to ODVA standard (rated value 24VDC (11 to25VDC) 4VA |
Standard Fitting |
1/4"VCR Type or IGS |
