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SEC-Z500 series
Specification
Dimension
High Accuracy
High Speed Response
Multi Gas/Multi Range Solution

Multi Range Multi Gas digital mass flow controllers

SEC-Z500 series


Multi Gas/Multi Range Solution

SEC-Z500 series Gases and Full Scale Range can be changed by the customer using our exclusive software. It is possible to configure the MFC without dismounting it from the gas panel or piping, giving an advantage for cost and time reduction on your maintenance operation.

Easy spec change at customer

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