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	SEC-Z500 series
	Specification
	Dimension
	High Accuracy
	High Speed Response
	Multi Gas/Multi Range Solution

Multi Range Multi Gas digital mass flow controllers

SEC-Z500 series

High Accuracy

MFC's linearity is compensated by polynomial approximated curve. This achieves high accuracy for all flow control ranges. For the purpose of advancement of actual gas accuracy, the calibration data of various process gases are measured by HORIBA STEC standard gas measurement system.

Accuracy

±1.0% S.P. : 25 –100% F.S.
±0.25% F.S. : <25% F.S.

Linearity is compensated by polynomial approximated carve

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