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Advanced High reliability 32bit CPU installed. |
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10SCCM-10SLM FS (standard gas) is covered by 6MFCs. |
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Gas and FS flow specification are available to change easily by user. (MRMG function) |
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High precision. (Set point accuracy) |
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Fast Response across the whole flow range. (Variable PID function) |
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Analog/Digital (RS485) control mode or DeviceNet Interface available.
(Passed the ODVA (DeviceNet Association) SEMI SIG conformance test.) |
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Compact
SEC-Z512: Compatible with 1.125 inch pitch gas panel.
SEC-Z512/522: 106mm between VCR surface (Compatible with 1.5 inch gas panel.) |
