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DeviceNet™ compatible digital mass flow controllers
SEC-Z10D/Z10DW series
Specification
Model SEC- |
Z10D |
Z12D |
Z13D |
Materials used in gas contact area |
M: type, SUS316L, internal surface polishing standard |
Valve type |
Open at power-off: O
Closed at power-off: C |
Closed at power-off: C |
Standard flow rate range (N2 equivalent F.S.) |
5/10/20/30/50/
100/200/300/
500 SCCM
1/2/3/5 SLM |
10 SLM |
20/30 SLM |
100 SLM (H2, H2) |
Flow rate control range |
2 to 100% F.S. |
5 to 100% F.S. |
Response speed |
Less than 1 sec (T98) |
Accuracy |
± 1% F.S. |
Linearity |
± 0.5% F.S. |
Repeatability |
± 0.2% F.S. |
Operating differential pressure |
50 to 300 kPa (d) |
100 to 300 kPa (d) |
20 SLM: 150 to 300 kPa (d)
30 SLM: 200 to 300 kPa (d) |
N2: 350 to 400 kPa (d)
H2: 250 to 300 kPa (d) |
Maximum operating pressure |
300 kPa (G) |
N2: 400 kPa (G)
H2: 300 kPa (G) |
Pressure Resistance |
1 MPa (G) |
Leak Integrity |
less than 5 x 10-12 Pa·m3/s (He) |
Operating temperature |
5 to 50°C (accuracy guaranteed between 15 and 45°C) |
Drive power source |
Conforms to ODVA standard (rated value 24 VDC (11 to 25 VDC)) 3.5 VA |
Connector position |
Top or sides |
Top |
Standard Fitting |
1/4 VCR type or IGS |
3/8 VCR type or IGS |
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Model SEC- |
Z11DW |
Z12DW |
Z13DW |
Materials used in gas contact area |
M: type, SUS316L, internal surface polishing standard |
Valve type |
Open at power-off: O Close at power-off: C |
Standard flow rate range (N2 equivalent F.S.) |
5/10/20/30/50/
100/200/300/
500 SCCM
1/2/3/5 SLM |
10 SLM |
20/30 SLM |
50 SLM |
100 SLM
(H2 200 SLM: Option) |
Flow rate control range |
2 to 100% F.S. |
Response speed |
Less than 1 sec (T98) |
Less than 1.5 sec (T98) |
Accuracy |
± 1% F.S. |
Linearity |
± 0.5% F.S. |
Repeatability |
± 0.2% F.S. |
Operating differential pressure |
150 to 300 kPa (d) |
200 to 300 kPa (d) |
150 to 300 kPa (d) |
200 to 300 kPa (d) |
100 SLM: 150 to 300 kPa (d)
H2 200 SLM: 200 to 300 kPa (d) |
Maximum operating pressure |
300 kPa (G) |
Pressure Resistance |
1 MPa (G) |
Leak Integrity |
less than 5 x 10-12 Pa·m3/s (He) |
Operating temperature |
5 to 50°C (accuracy guaranteed between 15 and 45°C) |
Drive power source |
Conforms to ODVA standard (rated value 24 VDC (11 to 25 VDC)) 3.5 VA *1 |
Connector position |
Top or sides |
Top |
Standard Fitting |
1/4 VCR type or IGS |
3/8 VCR type |
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* SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa).
*1 Power capacity for the DeviceNetTM Mass Flow Controller
It is recommended that a power capacity of four times the normal operating power be provided to allow for increased power during power start-up.
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