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SEC-Z10D/Z10DW series
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Dimension

DeviceNet™ compatible digital mass flow controllers

SEC-Z10D/Z10DW series


Cutting edge models with DeviceNet™ communications
Compatible with the DeviceNet™ interface: Passed the ODVA (DeviceNet™ Association) SEMI SIG conformance test.
Full scale 5 SCCM to 100 SLM flow rate lineup.
Fast response in the control flow rate range.
Ultra clean models featuring piezo valves.
Compact
SEC-Z11D/Z12D: Compatible with 1.125 inch pitch gas panels
SEC-Z10DW/Z12DW: 106 mm between VCR type surfaces (Compatible with 1.5 inch pitch gas panels)

Brochure Related Info
Products

Products
Multi Range Multi Gas digital mass flow controllers
SEC-Z500X series
Multi Range Multi Gas digital mass flow controllers SEC-Z500 series
Cutting edge models with DeviceNet™ or Digital communications

 
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