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Mass flow controllers
SEC-E40 series
Specification
Model |
SEC-(mass flow controller) |
E40/
E40MK3 |
E50/
E50MK3 |
E60 |
E70 |
E80 |
SEF-(mass flow meter) |
E40 |
E50 |
E60 |
E70 |
E80 |
Types of gas*1 |
Non-corrosive gases (the MK3 model can handle N2, O2, air, H2, Ar, and He) |
N2, O2, Air, H2, Ar, C3H8, CH4, C4H10 |
N2, O2, Air, H2 |
Materials at gas contact area |
SUS316L, Viton®, PTFE, magnetic stainless steel |
SUS316L, Viton®, magnetic stainless steel |
Valve type |
Close at power-off: C |
Standard flow rate range (N2 equivalent F.S.)*1 |
10/20/30/50/100/
200/300/500 SCCM
1/2/3/5/10 SLM |
20/30 SLM |
50/100 SLM |
200 SLM |
300/500 SLM |
Flow rate control range (for SEC series) |
2 to 100% F.S. |
5 to 100% F.S. |
Flow rate control range (for SEF series) |
0 to 100% F.S. |
Response speed |
Less than 1 sec (T98) |
Less than 2 seconds (T98) |
Accuracy |
± 1% F.S. |
± 2% F.S. |
Linearity |
± 0.5% F.S. |
± 1% F.S. |
Repeatability |
± 0.2% F.S. |
± 0.5% F.S. |
± 1% F.S. |
Operating differential pressure (for SEC series) |
10 SCCM to 5 SLM: 50 to 300 kPa (d); 10 to 30 SLM: 100 to 300 kPa (d) |
100 to 300kPa (d) |
200 to 350kPa (d) |
Usage pressure (for SEF series) |
300 kPa (G) |
350 kPa (G) |
Pressure Resistance |
1 MPa (G) |
Leak Integrity |
1 x 10-10 Pa·m3/s (He) |
1 x 10-10 Pa·m3/s (He) |
450 kPa (G) added pressure with loss of pressure less than 1% over 10 minutes |
Operating temperature |
5 to 50°C (accuracy guaranteed between 15 and 35°C) |
5 to 45°C (accuracy guaranteed between 15 and 35°C) |
Flow rate setting signal |
SEC-E40(MK3).E50(MK3) :0.1 to 5VDC (Input impedance : more then 1MΩ)
SEC-E60.E70.E80 :0.25 to 5VDC (Input impedance : more then 1MΩ) |
Flow rate output signal |
Analog:0 to 5VDC (Minimun load resistance 2kΩ) |
Drive power source |
+15 VDC ± 5%, 50 mA
-15 VDC ± 5%, 150 mA, 3 VA |
+15 VDC ± 5%, 50 mA
-15 VDC ± 5%, 200 mA, 3.9 VA |
Standard Fitting*2 |
1/4 Swagelok type |
3/8 Swagelok type |
1/2 Swagelok type |
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*1 Please contact HORIBA STEC for information on types of gas other than those listed.
*2 Non-standard joints can also be used. Please contact HORIBA STEC for more information.
* The SEC-E40, SEC-E50, SEC-E40MK3 and SEC-E50MK3 feature an auto-zero function as well.
* Inlet pressure for the SEC-E40/50/60/E40MK3/E50MK3: maximum 300 kPa (G) or under. For the SEC-70/80: maximum 350 kPa (G) or under.
* SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa).
* Viton® is registered trademark of E. I. DuPont de Nemours.
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