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Mass flow controllers
SEC-8000/2000 series
Specification
Model |
SEC-(mass flow controller) |
8340S |
8440S |
8450S |
8455S |
8460S |
SEF-(mass flow meter) |
8340S |
8440S |
8450S |
8455S |
8460S |
Materials used in gas contact area |
SUS316L |
Valve type |
Open at power-off: O |
Standard flow rate range
(N2 equivalent F.S.) |
5/10/20/50/
100200/500 SCCM
1/2 SLM |
3/5/10 SLM |
10/20 SLM |
20/30/
50 SLM |
Flow rate control range |
2 to 100% F.S. |
Response speed |
Less than 2 sec (T98) |
Accuracy |
± 1% F.S. |
Linearity |
± 0.5% F.S. |
Repeatability |
± 0.2% F.S. |
Operating differential pressure*1 |
50 to 300 kPa (d) |
100 to 300 kPa (d) |
20/30 SLM
100 to 300 kPa (d)
50 SLM
150 to 300 kPa (d) |
Maximum operating pressure |
300 kPa (G) |
Pressure Resistance |
1 MPa (G) |
Leak Integrity |
5 x 10-12 Pa·m3/s (He) |
Operating temperature |
L type: 80 to 100°C; M type: 100 to 120°C |
Flow rate setting signal |
0.1 to 5VDC (Input impedance : more then 1MΩ) |
Flow rate output signal |
0 to 5VDC (Minimun load resistance 2kΩ) |
Drive power source |
+15 VDC ± 5%, 60 mA; -15 VDC ± 5%, 60 mA, 1.8 VA
SEC-8340S: For heater, AC 100 V, 56 VA |
Standard Fitting |
1/4 VCR type |
3/8 VCR type |
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Model |
SEC-(mass flow controller) |
8440LS |
8450LS |
8455LS |
8460LS |
SEF-(mass flow meter) |
8440LS |
8450LS |
8455LS |
8460LS |
Materials used in gas contact area |
SUS316L |
Valve type |
Open at power-off: O |
Standard flow rate range
(N2 equivalent F.S.) |
5/10/20/30
50/100/200
300/500 SCCM
1/2/3/5 SLM |
10/20 SLM |
30/50 SLM |
50/100 SLM |
Flow rate control range |
2 to 100% F.S. |
Response speed |
Less than 1 sec (T98) |
Accuracy |
± 1% F.S. |
Linearity |
± 0.5% F.S. |
Repeatability |
± 0.2% F.S. |
Operating differential pressure*1 |
50 to 300 kPa (d) |
100 to 300 kPa (d) |
30 SLM
100 to 300 kPa (d)
50 SLM
150 to 300 kPa (d) |
50 SLM
100 to 300 kPa (d)
100 SLM
150 to 300 kPa (d) |
Maximum operating pressure |
300 kPa (G) |
Pressure Resistance |
1 MPa (G) |
Leak Integrity |
5 x 10-12 Pa·m3/s (He) |
Operating temperature |
L type: 15 to 35°C; M type: 35 to 60°C; H type: 60 to 80°C |
Flow rate setting signal |
0.1 to 5VDC (Input impedance : more then 1MΩ) |
Flow rate output signal |
0 to 5VDC (Minimun load resistance 2kΩ) |
Drive power source |
+15 VDC ± 5%, 60 mA; -15 VDC ± 5%, 60 mA, 1.8 VA
SEC-8340S: For heater, AC 100 V, 56 VA |
Standard Fitting |
1/4 VCR type |
3/8 VCR type |
|
Model |
SEC-(mass flow controller) |
2410 |
2510 |
2551 |
SEF-(mass flow meter) |
2410 |
2510 |
2551 |
Materials used in gas contact area |
SUS316L, Viton® |
Valve type |
Open at power-off: O |
Standard flow rate range
(N2 equivalent F.S.) |
10/20/30/50/
100/200/300/
500 SCCM
1/2/3/5 SLM |
10/20 SLM |
30/50/
100 SLM |
Flow rate control range |
5 to 100% F.S. |
Response speed |
Less than 6 sec (T98) |
Accuracy |
± 1% F.S. |
Linearity |
± 0.5% F.S. |
Repeatability |
± 0.2% F.S. |
Operating differential pressure*1 |
50 to 300 kPa (d) |
100 to 300
kPa (d) |
Maximum operating pressure |
300 kPa (G) |
Pressure Resistance |
1 MPa (G) |
Leak Integrity |
1 x 10-8 Pa·m3/s (He) |
Operating temperature |
Specify between 35 and 80°C. |
Flow rate setting signal |
0.25 to 5VDC (Input impedance : more then 1MΩ) |
Flow rate output signal |
0 to 5VDC (Minimun load resistance 2kΩ) |
Drive power source |
+15 VDC ± 5%, 60 mA; -15 VDC ± 5%, 150 mA, 3.2 VA |
Standard Fitting |
1/4 VCR type |
3/8 VCR type |
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*1 The operating pressure may vary depending on the conditions of use. Please contact HORIBA STEC about this.
The SEC-8340 type features a heater within the main unit.
* SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa).
* Viton® is registered trademark of E. I. DuPont de Nemours.
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