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Mass flow controllers
SEC-8000/2000 series
A best-seller mass flow controller for high temperature environments
SEC-8000 series (featuring piezo actuator valves)
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Ultra clean: All metal construction |
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Compatible with 150°C baking: Feature sensors and valves that can withstand high temperatures. |
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Compatible with a wide variety of processes: Ultra pure gas supply, organic metal materials for MOCVD, low vapor pressure materials, ideal for flow rate control of corrosive gases. |
SEC-2000 series (featuring thermal valves)
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A proven record: Boasting a terrific record as a TEOS vaporization supply system, this series is the standard for use with the LSC series. |
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