 |
|
|
Mass Flow Controller
SEC-7300 series
Overview
•Reliable, Accurate Zero Point / New Type Sensor
•Fast Response / New Type PC Board
•Compact Size Pioneer Model / Face to face dimension 106mm
•Low Differential Pressure Model / SEC-7340LD : SDS (R) Safe Delivery Source (R) Model Applicable Gases / AsH3, BF3,
PH3, SiF4, GeF4
* "SDS" is a registered trademark of Matheson Tri-Gas, Semi-Gas, Division and ATMI, Inc.
Specifications
SEC-7320 |
|
Wetted Materials : |
M type : SUS-316L, R type : SUS-316L, Viton |
Valve Type : |
open and close at power-off |
Flow Range : |
1/2/3 SCCM |
Flow Control Range : |
2 - 100% F.S. |
Accuracy : |
±1.0% F.S. |
|
SEC-7330 |
|
Wetted Materials : |
M type : SUS-316L, R type : SUS-316L, Viton |
Valve Type : |
open and close at power-off |
Flow Range : |
5/10/20/50/100/200/500 SCCM 1/2 SLM |
Flow Control Range : |
2 - 100% F.S. |
Accuracy : |
±1.0% F.S. |
|
SEC-7340 |
|
Wetted Materials : |
M type : SUS-316L, R type : SUS-316L, Viton |
Valve Type : |
open and close at power-off |
Flow Range : |
3/5/10 SLM |
Flow Control Range : |
2 - 100% F.S. |
Accuracy : |
±1.0% F.S. |
|
SEC-7350 |
|
Wetted Materials : |
M type : SUS-316L, R type : SUS-316L, Viton |
Valve Type : |
open and close at power-off |
Flow Range : |
20/30 SLM |
Flow Control Range : |
2 - 100% F.S. |
Accuracy : |
±1.0% F.S. |
|
SEC-7355 |
|
Wetted Materials : |
M type : SUS-316L, R type : SUS-316L, Viton |
Valve Type : |
open and close at power-off |
Flow Range : |
50 SLM (H2 : 100SLM) |
Flow Control Range : |
2 - 100% F.S. |
Accuracy : |
±1.0% F.S. |
|
SEC-7340LD |
|
Wetted Materials : |
M type : SUS-316L, R type : SUS-316L, Viton |
Valve Type : |
open and close at power-off |
Flow Range : |
2/3/5/10 SCCM 20 SCCM, 15Torr 30SCCM 20Torr |
Flow Control Range : |
2 - 100% F.S. |
Accuracy : |
±1.0% F.S. |
|
|
