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Mass Flow Controller
SEC-4400 series
Overview
Best Seller Model Ultra Clean MFC
•Stainless Diaphragm / Metal O-ring (M type)
•High Purge MFC / SEC-4400SP
•Wide Range MFC / SEC-4400SR
•Free Mounting Orientation MFC / SEC-4400MF, 4500MF Applicable Gas : C2F6, C3F8, C4F8, SF6, SiF8 etc.
Specifications
SEC-4400 |
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Wetted Materials : |
M type : SUS-316L, R type : SUS-316L, Viton |
Valve Type : |
open and close at power-off |
Flow Range : |
5/10/20/50/100/200/500 SCCM 1/2/5 SLM |
Flow Control Range : |
2 - 100% F.S. |
Accuracy : |
±1.0% F.S. |
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SEC-4500 |
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Wetted Materials : |
SUS-316L, R type : SUS-316L, Viton |
Valve Type : |
open and close at power-off |
Flow Range : |
10 SLM/20 SLM |
Flow Control Range : |
2 - 100% F.S. |
Accuracy : |
±1.0% F.S. |
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SEC-4550 |
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Wetted Materials : |
M type : SUS-316L, R type : SUS-316L, Viton |
Valve Type : |
open and close at power-off |
Flow Range : |
30/50 SLM |
Flow Control Range : |
2 - 100% F.S. |
Accuracy : |
±1.0% F.S. |
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SEC-4600 |
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Wetted Materials : |
M type : SUS-316L, R type : SUS-316L, Viton |
Valve Type : |
open and close at power-off |
Flow Range : |
50/100 SLM |
Flow Control Range : |
2 - 100% F.S. |
Accuracy : |
±1.0% F.S. |
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SEC-4400MF |
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Wetted Materials : |
M type : SUS-316L |
Valve Type : |
open and close at power-off |
Flow Range : |
5/10/20/50/100/200/500 SCCM 1/2/5 SLM |
Flow Control Range : |
2 - 100% F.S. |
Accuracy : |
±1.0% F.S. |
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SEC-4500MF |
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Wetted Materials : |
M type : SUS-316L |
Valve Type : |
open and close at power-off |
Flow Range : |
10/20 SLM |
Flow Control Range : |
2 - 100% F.S. |
Accuracy : |
±1.0% F.S. |
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SEC-4400SP |
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Wetted Materials : |
M type : SUS-316L. Viton |
Valve Type : |
open at power-off |
Flow Range : |
5/10/20/50/100/200 SCCM |
Flow Control Range : |
2 - 100% F.S. |
Response : |
less than 1 second (T98) |
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SEC-4400SR |
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Wetted Materials : |
M type : SUS-316L. R type : SUS-316L, Viton |
Valve Type : |
open at power-off |
Flow Range : |
500 SCCM 1/2/3/5 SLM |
Flow Control Range : |
0.5 _ 100% F.S. |
Response : |
less than 1 second (T98) |
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