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SEC-400 series
Specification
Dimension

Mass flow controllers

SEC-400 series


A basic mass flow controller
High precision: ±0.5% F.S.: SEC-405 (limited gas compatibility)
Compatible with a wide variety of flow rate control needs: Flow rate control between 0.1 SCCM and 200 SLM (N2) available in a single series.
Compact: 106 mm between surfaces: SEC-300 type
Low cost: A lineup of cost effective models: SEC-400MK3/500MK3

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