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Residual Gas Analyzer
MicroPole™ System
Specification
Name |
Plasma card model (SMPA-)*1 |
Model |
1-2/45 |
11-2/45 |
7-2/65 |
5-2/65 |
5-2/100 |
1-4/300 |
Mass range (AMU) |
2 to 45 |
2 to 45 |
2 to 65 |
2 to 65 |
2 to 100 |
4 to 300 |
Resolution (FWHM) |
0.5 AMU |
1.5 AMU |
0.9 AMU |
0.8 AMU |
1 AMU |
1.5 AMU |
Maximum operating pressure |
0.133 Pa (N2)
1 mTorr (N2) |
1.466 Pa (N2)
11 mTorr (N2) |
0.933 Pa (N2)
7 mTorr (N2) |
0.666 Pa (N2)
5 mTorr (N2) |
0.666 Pa (N2)
5 mTorr (N2) |
0.133 Pa (N2)
1 mTorr (N2) |
Minimum detected partial pressure |
1.33 x 10-8 Pa (N2) |
Minimum detected
He leak rate |
2 x 10-9 Pa·m3/s
2 x 10-8 atm·cm3/s |
2 x 10-8 Pa·m3/s
2 x 10-7 atm·cm3/s |
2 x 10-9 Pa·m3/s
2 x 10-8 atm·cm3/s |
Filament material |
Y2O3/Ir (standard) or Pure W |
Maximum operating temperature |
150°C (maximum baking temperature [sensor portion]: 350°C) |
Attachment flange type |
Type C: Ø34 Conflat flange; Type K: KF-16 flange |
Spectraconverter
model*2 |
SC6-18 |
SC6-14 |
SC6-11 |
SC6-07 |
Interface |
RS232C/RS485 (selectable Baud rates: 9,600/19,200/38,400) |
Software |
Win MPA (Microsoft Windows XP 2000, Me, NT 4.0, 95/98, 3.1, 3.11) |
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Name |
Sensor model (MPA6-)*1 |
Model |
1-2/45 |
11-2/45 |
7-2/65 |
5-2/65 |
5-2/100 |
1-4/300 |
Mass range (AMU) |
2 to 45 |
2 to 45 |
2 to 65 |
2 to 65 |
2 to 100 |
4 to 300 |
Resolution (FWHM) |
0.5 AMU |
1.5 AMU |
0.9 AMU |
0.8 AMU |
1 AMU |
1.5 AMU |
Maximum operating pressure |
0.133 Pa (N2)
1 mTorr (N2) |
1.466 Pa (N2)
11 mTorr (N2) |
0.933 Pa (N2)
7 mTorr (N2) |
0.666 Pa (N2)
5 mTorr (N2) |
0.666 Pa (N2)
5 mTorr (N2) |
0.133 Pa (N2)
1 mTorr (N2) |
Minimum detected partial pressure |
1.33 x 10-8 Pa (N2) |
Minimum detected
He leak rate |
2 x 10-9 Pa·m3/s
2 x 10-8 atm·cm3/s |
2 x 10-8 Pa·m3/s
2 x 10-7 atm·cm3/s |
2 x 10-9 Pa·m3/s
2 x 10-8 atm·cm3/s |
Filament material |
Y2O3/Ir (standard) or Pure W |
Maximum operating temperature |
150°C (maximum baking temperature [sensor portion]: 350°C) |
Attachment flange type |
Type C: Ø34 Conflat flange; Type K: KF-16 flange |
Spectraconverter
model*2 |
SC6-18 |
SC6-14 |
SC6-11 |
SC6-07 |
Interface |
RS232C/RS485 (selectable Baud rates: 9,600/19,200/38,400) |
Software |
Win MPA (Microsoft Windows XP 2000, Me, NT 4.0, 95/98, 3.1, 3.11) |
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*1 The MicroPole analyzers are available in SMPA and MPA models. The SMPA is protected by mesh so that it can be used under extreme conditions such as those of plasma processing.
*2 Electron energy of 70 eV or 43 eV can be selected from the PC.
*AMU: Atomic Mass Unit.
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