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MicroPole™ System
Specification
Measurement principle
MicroPole™ Analyzer
Sample layout
Wet clean recovery
Sputter process monitoring

Residual Gas Analyzer

MicroPole™ System


Sample layout

(when multiple MicroPoles use an RS485 for communication)
To work with multiple MicroPoles, use RS485 cables for communications between all the CNL/CNIs, starting with the first one.

Sample layout
Brochure
 
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