Residual Gas Analyzer

World's smallest and lightest.

Features nine pairs of quadropoles.

Can operate at low vacuum (high pressure): 1.46 Pa (11 mTorr)

High-speed measurement. Scanning speed: 0.6 sec/mass.
Resolution: 0.5 AMU. Detection limit: 1.33 x 10^-8 Pa.

Uses disposable sensor heads.

No need for degassing.

Can be connected to a NW 60.Ø34 Conflat flange.

A variety of graph modes available for residual gas analysis.

Recent semiconductor processes have reached the nano level, and a topic of much concern is whether or not the prescribed chemical/physical response conditions can be reproduced consistently. In particular, attention has been focused on the measurement and analysis of residual gas in the reaction vessels of the various vacuum devices used in dry processes. HORIBA STEC offers a residual gas analyzer (RGA) with the world’s smallest quadropole mass spectrometer.