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	PV series
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Piezo Valve

PV series

Overview

•High Performance for Gas and Liquid Applications
•Fast Responce / Less than 0.5 sec.
•Non-Particle construction
•Piezo control action
•Accepts manual full open / close signal.

PV-1000

Flow Range	1/5/100/200/500 CCM 1/2/5 LM (Inlet:atmospheric pressure•Outlet:vacuum•N2equiv)
Flow Control Range	2 -100% F.S.
Valve Type	normally open / close
Input Signal	0 - 5VDC
Responce	less than 0.5 sec.
Operating Temperature	0 - 50 °C
Operating Diffential Pressure	MAX. 300 kPa(a)(max,42psi)
Pressure Resistance	1MPa
Leak Integrity	5×10-12Pa•m3(He)

PV-2000

Flow Range	10/20 LM
Flow Control Range	2 -100% F.S.
Valve Type	normally open / close
Input Signal	0 - 5VDC
Responce	less than 0.5 sec.
Operating Temperature	0 - 50 °C
Operating Diffential Pressure	MAX. 300 kPa(a)(max,42psi)
Pressure Resistance	1MPa
Leak Integrity	5×10-12Pa•m3(He)

Products

Multi Range Multi Gas digital mass flow controllers
SEC-Z500 series

Cutting edge models with DeviceNet™ or Digital communications

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