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Pressure Insensitive Mass Flow Module
High stability Mass Flow Module- Gas flow control is unaffected by upstream and downstream pressure fluctuations.
Thermal Sensor Detection
PI Mass Flow Module
SEC-Z700 series
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•Stable flow control by newly developed "Variable PID system" (patent pending)
Features
- Multi Gas / Multi Range function. - The gas type and full scale flow rate can be changed by the customer.
- Variable PID function gives high speed response (within 1 sec) across the whole flow range.
- Compact gas line. - No need for the regulator, transducer and filter.
- Stable control of the gas flow without effect by upstream and downstream pressure fluctuations.
- Integrated Inlet Pressure Sensor.
- On board Multi display.
- Warranty 1% Set Point high accuracy.
- Ultra clean design - Metal diaphragm, all stainless SUS-316L and polished surface treatment(standard).
- Compact size - Same fitting to fitting dimension up to 50 SLM.
- Signal compatibility - Analog/RS485 Digital Model , DeviceNet™ Model.
- Network function - Controlled by digital signal.
Flow control condition
During 50kPa, upstream pressure fluctuation, Z700 can make stable flow control.
Test flow
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