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Pressure Insensitive Mass Flow Module
High stability Mass Flow Module- Gas flow control is unaffected by upstream and downstream pressure fluctuations.
Differential Pressure Detection
PI Mass Flow Module
CRITERION D200 series
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•Compact gas panel with wide range flow rate control
Features
- Latest cutting-edge differential pressure detection available first in the market.
- Compact gas line -wide range compact gas panel. (No need for pressure sensor, regulator and filter.)
- Control flow rate from low to high. (Wide range)
- High accuracy from 3D mapping.
- Improve process yield - supply the standard flow rate to semiconductor process.
Wide Range Ability
Control wide range flow rate more than 300 times turn down capability.
Gas panel flow diagram
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