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Digital Liquid Mass Flow Meter / Controller
LF-F/LV-F series
Specification
Model |
LF-F20M-A |
LF-F30M-A |
LF-F40M-A |
LF-F50M-A |
LF-F60M-A |
Flow Range (g/min) |
0.02/0.05/0.1 |
0.2/0.5 |
1/2/5 |
10/20 |
50/100 |
Measurement Range |
5 to 100% F.S. |
Application Liquid*1 |
All liquids except those corrosive to stainless steel (ex, HCl and HF) |
Viscosity*2 |
max. 0.1 Pa·s (100cp) |
Accuracy*3 |
±1% F.S. |
Linearity |
±0.5% F.S. |
Repeatability |
±0.5% F.S. |
Response speed*4 |
Less than 3sec (T98) |
Less than 2sec (T98) |
Operating Temperature*5 |
5 to 50°C |
Temperature coefficiency |
± 0.1%F.S./°C max± 1% |
Operating Pressure*6 |
Max. 5MPa (as flow meter) / 50 to 300kPa (with piezo control valve) |
Pressure Resistance |
10MPa (as flow meter) |
Pressure Drop*7 |
max. 500Pa |
Flow Rate Signal |
Analog: 0 to 5 VDC Digital: RS485 |
Power Supply |
+15 V ± 5%, 200 mA -15 V ± 5%, 200 mA |
Leak Integrity |
5 x 10-12Pa·m3/s (He) |
Wetted Material |
SUS316L, Ni |
Standard Fitting |
1/16" , 1/8" compression fitting, 1/8" VCR type |
1/8" compression fitting 1/8" VCR type |
1/4" compression fitting 1/4" VCR type |
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| Model |
LV-F20(PO/MO) |
LV-F30(PO/MO) |
LV-F40(PO/MO) |
LV-F50(PO/MO) |
LV-F60(PO/MO) |
Flow Range (g/min) |
0.02/0.05/0.1 |
0.2/0.5 |
1/2/5 |
10/20 |
50/100 |
Measurement Range |
5 to 100% F.S. |
Application Liquid*1 |
All liquids except those corrosive to stainless steel (ex, HCl and HF) |
Viscosity*2 |
max. 0.01 Pa·s (10cp) |
Accuracy*3 |
±1% F.S. |
Linearity |
±0.5% F.S. |
Repeatability |
±0.5% F.S. |
Response speed*4 |
Less than 3sec (T98) |
Less than 2sec (T98) |
Operating Temperature*5 |
5 to 50°C |
Temperature coefficiency |
± 0.1%F.S./°C max± 1% |
Operating Pressure*6 |
0.05 to 0.3 MPa |
Pressure Resistance |
1MPa |
Pressure Drop*7 |
- |
Flow Rate Signal |
Analog: 0 to 5 VDC Digital: RS485 |
Power Supply |
+15 V ± 5%, 200 mA -15 V ± 5%, 200 mA |
Leak Integrity |
PO Type: Less than 1 to 10-8Pa·m3/s (He) MO Type: Less than 5 to 10-12Pa·m3/s (He) |
Wetted Material |
PO Type: SUS316L, Ni, PTFE, PFA MO Type: SUS316L,Ni |
Standard Fitting |
1/16" , 1/8" compression fitting, 1/8" VCR type |
1/8" compression fitting 1/8" VCR type |
1/4" compression fitting 1/4" VCR type |
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*1 With the LF-F/LV-F Series, flow rate calibration is performed using one specified type of liquid. (Please indicate the type of liquid to be used when ordering the device.)
- Liquids containing solid materials cannot be measured. - Please consult us in advance if you plan to use these devices with liquid mixture for which the mixture ratio may vary.
- With the LV-F Series, if the liquid to be measured contains particle etc., please install a 0.2 µm (Abs) filter on the primary side.
*2 The LV-F Type can be used with a maximum viscosity of 0.01Pa·s depending on the flow rate range. Please consult us in advance if you plan to use this device with high-viscosity liquids.
*3 Specification of accuracy, linearity and repeatability is guaranteed against calibrated liquid based on SEMI E56-1296.
*4 It is the specification which is adjusted by Auto-PID function with our piezo control valve.
*5 In order to ensure precise measurement, please maintain incoming liquid temperature to be within 10 deg.C lower or 3 deg.C higher than the ambient temperature.
*6 Specification of Operating Pressure is the pressure range when liquid viscosity is 0.001Pa·s.
*7 Specification of pressure drop is when liquid (with viscosity of 0.001Pa·s) is introduced at 100% F.S. of measurement point.
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