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IR-150 series
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Inline Gas Monitors

IR-150 series


Inline gas density monitors that use the non-dispersive infrared (NDIR) method

High-level, real-time measurement in an inline format.
Ideal for measuring the density of gases generated by the liquid and solid sources used in MOCVD.
TMAI, TMGa, TMIn, DMZn.
Compact, mount-free design.

The IR-150 series measure the density of gases generated by liquid and solid sources during the MOCVD process. They can be used to monitor and measure the density after bubbling to ensure a stable supply of materials. These inexpensive inline gas monitors use the NDIR method.

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