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Products & Support Mass Flow Controller Liquid Flow and Vaporizer Vacuum and Gas Monitor Pressure Controller Semiconductor Process Product List


Product List


Categories

Mass Flow Controller
Mass Flow Meter
High-precision flow rate meter for precision films
Accessory
Mass flow checker
Pressure Controller
Liquid Flow and Vaporizer
Vacuum
Gas Monitor
Hydrogen Generator


 

Mass Flow Controller

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SEC-Z500 series
SEC-V100D series
SEC-Z10D/Z10DW series
SEC-F700 series

SEC-7300 series
SEC-4401/4501 series
SEC-4400 series
SEC-E400J series
SEC-E40 series
SEC-400 series
SEC-8000/2000 series


 

Mass Flow Meter

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SEF-V100D series

SEF-7300 series
SEF-4401/4501 series
SEF-4400 series
SEF-E40 series
SEF-400 series
SEF-8000/2000 series


 

High-precision flow rate meter for precision films

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SF-1U·2U


 

Accessory

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PAC-S6
PAC-D1/D2
Fl-1100
PAC series
DU series
SU-503ED·502EA
DS-3
SC/CA series


 

Mass flow checker

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MFT-20


 

Pressure Controller

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UR-7300 series
PV-1000/2000 series
EC-5000 series


 

Liquid Flow and Vaporizer

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LF-F/LV-F series
MI/MV series
VC series
LSC-A100
TL series
LU-A100


 

Vacuum

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MICROPOLE™ System : RGA


 

Gas Monitor

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FG-100 series
IR-150 series


 

Hydrogen Generator

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OPGU-3000 series



List by Object of Analysis / Measurement
List by Production Process





 

Combined catalog

Products Guidance (PDF2.4MB)
Liquid Source Vaporization Control Systems (PDF762KB)
Pressure Controllers (PDF892KB)


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