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FG-100 series
Specification

FTIR Gas Analyzer

FG-100 series


Efficient gas measurement for processes in a compact package

Single cell and dual cell types available.
Five cell lengths available, to allow measurement of different gas densities.
Uses an electrically cooled MCT detector that does not require liquid nitrogen.
Exclusive sampling units provided.
High-precision measurement in the sub-ppm order.
Features software that is ideal for real-time analysis.

The FG-100 series are FTIR gas analyzers that can be used to analyze greenhouse gases and PFCs, whose reduction is now desired to prevent global warming, as well as semiconductor and FPD process gases, and other types of gases.
  To enable efficient gas analysis on-site, these units have been made much more compact, and are also available in both single and dual cell types. These analyzers are easy to move and install at desired measurement locations, and are suitable for a variety of analysis uses. These total systems feature sampling units that are ideal for semiconductor and FPD gas analysis, as well as a sizeable gas spectral library, and software that makes operating the units easy.

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