
	Home > Products & Support > Exhaust Control System

Product Image

	EC Series
	Dimension

Exhaust Control System

EC Series

Overview

•Chamber Pressure Control
•Two Models enable

Specifications

EC-5104

Fittings	NW40
Contact Materials	SUS-316L•Viton
Conductance	0.4 - 80 L/s
(vacuum sphere)
Leak in 100mmH₂O	20 L/min
(full close)

EC-5105

Fittings	NW50
Contact Materials	SUS-316L•Viton
Conductance	0.6 - 200 L/s
(vacuum sphere)
Leak in 100mmH₂O	25 L/min
(full close)

EC-5202

Fittings	25mm Teflon fittings
	1 inch Teflon fittings
Contact Materials	PTFE•PEEK•Viton
Leak in 100mmH₂O	3 L/min
(full close)
This product is subject to Japan's Export Control Law (i.e. on its control list). Before exporting from Japan to overseas or supplying non-residence with it, Export License must be obtained from the Ministry of Economy, Trade and Industry (METI) of Japan.

Products

Multi Range Multi Gas digital mass flow controllers
SEC-Z500X series

Cutting edge models with DeviceNet™ or Digital communications

Copyright © 2008 HORIBA STEC, Co.,Ltd. All rights reserved. The information shown on this document may be modified without notice. Refer to the original web page for update. The page was copied from: