HORIBA STEC, Co., Ltd. was participated in SEMICON West 2007.
Thank you for your coming our booth !
＜Exposition Place＞
Moscone Center
747 Howard Street
San Francisco, California U.S.A.
Telephone: 1.415.974.4000
■HORIBA STEC booth : #714 South Hall
＜Exposition Dates & Hours＞
17-19th July, 2007
July 17, 10:00-18:00 (Tuesday)
July 18, 10:00-18:00 (Wednesday)
July 19, 10:00-16:00 (Thursday)
＜Exhibition Products＞
DIFFERENTIAL PRESSURE DETECTION PRESSURE INSENSITIVE MASS FLOW MODULE
* CRITERION D200/D200W
THERMAL SENSOR DETECTION PRESSURE INSENSITIVE MASS FLOW MODULE
* SEC-Z700 series
MULTI RANGE/GAS DIGITAL MASS FLOW CONTROLLER
*
SEC-Z500X series
RATIO CONTROLLER
* FS-100 series
HIGH TEMPERATURE MASS FLOW CONTROLLER
* SEC-8000 DeviceNet
TM model
DIGITAL LIQUID MASS FLOW METER / CONTROLLER
* LF-F / LV-F series
LIQUID VAPORIZATION SYSTEM
* MI-1000 series / Mixed Injection
* MV-1000 series / Mixed Injection
* VC series / Direct Injection
* IPA Vaporization System
DIGITAL AUTO PRESSURE REGURATOR
* UR-Z700 series
BACK WAFER COOLING SYSTEM
* GR-100F DeviceNet
TM Model
PROCESS MONITORING IN CHAMBER
* MICROPOLE
TM System / Residual Gas Analyzer
IN-LINE GAS MONITOR
* IR-150AS
SEMICON West 2007 Official Site
