HORIBA STEC, Co., Ltd. participated in SEMICON China 2007.
Thank you for your coming our booth!
＜Exposition Place＞
Shanghai New International Expo Centre (SNIEC)
2345 Longyang Road
Shanghai
201204, PR China
HORIBA STEC BOOTH : Hall W4／4453
＜Exposition Dates＞
21 - 23th MARCH, 2007
＜Exposition Hours＞
21th MARCH: 9:00 - 17:00
22th MARCH: 9:00 - 17:00
23th MARCH: 9:00 - 16:00
＜Exhibition Products＞
DIGITAL MASS FLOW MODULE
* CRITERION D200/D200W
PRESSURE INSENSITIVE MASS FLOW MODULE
* SEC-Z700 series
DIGITAL MASS FLOW CONTROLLER
*
SEC-Z500X series
RATIO CONTROLLER
* FS-100 series
DIGITAL LIQUID MASS FLOW METER / CONTROLLER
* LF-F / LV-F series
LIQUID VAPORIZATION SYSTEM
* MI-1000 series / Mixed Injection
* MV-1000 series / Mixed Injection
* VC series / Direct Injection
* IPA Vaporization System
Process Monitoring In Chamber
* MICROPOLE
TM System / Residual Gas Analyzer
OTHERS
* UR-Z700 series / Digital Auto Pressure Regulator
* IR-150 series / In-line Gas Monitor
SEMICON China 2007 :Official Site
