HORIBA STEC, Co., Ltd. participated in SEMICON Japan 2006.
Thank you for your coming our booth !
＜Exposition Dates＞
6 - 8th DECEMBER, 2006
＜Exposition Hours＞
10:00 - 17:00
＜Exposition Place＞
MAKUHARI MESSE
(2-1 Nakase Mihama-ku Chiba)
Location
5-minute walking distance from "Kaihin-Makuhari" station of JR Keiyo Line
or 15-minute bus ride from "Makuhari-Hongo" station of JR Sobu Line
Access Map
HORIBA STEC BOOTH NO. HALL3, 3B-409
HORIBA BOOTH NO. HALL3, 3B-309
＜Exhibition Products＞
DIGITAL MASS FLOW MODULE
* CRITERION D200/D200W
PRESSURE INSENSITIVE MASS FLOW MODULE
* SEC-Z700 series
DIGITAL MASS FLOW CONTROLLER
* SEC-Z500X series / Multi Range Multi Gas MFC
RATIO CONTROLLER
* FS-100 series
DIGITAL LIQUID MASS FLOW METER / CONTROLLER
* LF-F / LV-F series
LIQUID VAPORIZATION SYSTEM
* MI-1000 series / Mixed Injection
* MV-1000 series / Mixed Injection
* VC series / Direct Injection
* LSC-A100 series / Compact Baking System
* LU-A1100 series / Liquid Auto Refill System
* IPA Vaporization System
Process Monitoring In Chamber
* MICROPOLE
TM System / Residual Gas Analyzer
CHEMICAL
* MODEL 6500 series / Chemical Flow Controller
* MODEL 4400 series / Chemical Flow Meter
* MODEL 4000 series / Chemical Pressure Transducer
OTHERS
* UR-Z700 series / Digital Auto Pressure Regulator
* IR-150 series / In-line Gas Monitor
SEMICON Japan 2006
